In many fields of modern science and technology, from semiconductor chip manufacturing to high-end scientific research instruments, the demand for high vacuum environment is becoming more and more urgent. As a key device for obtaining high vacuum, the performance of high vacuum diffusion pump directly affects the success or failure of related processes and research. In the operation of high vacuum diffusion pump, the choice of pump oil is crucial. Phenyl silicone oil, with a series of unique and excellent properties, has become an ideal material for high vacuum diffusion pump oil, playing an irreplaceable role in many industries.
Performance advantages of phenyl silicone oil as high vacuum diffusion pump oil


1. Low vapor pressure characteristics
Maintaining a high vacuum environment requires the pump oil to have an extremely low vapor pressure. Phenyl silicone oil performs well in this regard. The phenyl group in its molecular structure interacts with the silicon-oxygen bond, making the molecules tightly bound and not easy to volatilize. Within the operating temperature range of the high vacuum diffusion pump, the vapor pressure of phenyl silicone oil is extremely low, which can effectively avoid the contamination of the vacuum system due to the volatilization of the pump oil, ensuring that the high vacuum degree in the system can be maintained stably for a long time. For example, in the photolithography process of semiconductor manufacturing, the purity of the vacuum environment is extremely high. The low vapor pressure characteristics of phenyl silicone oil can prevent tiny oil vapor molecules from adhering to the surface of the chip, thereby ensuring the high precision and yield rate of chip manufacturing.


2. High boiling point and thermal stability
When the high vacuum diffusion pump is working, a large amount of heat will be generated inside due to high-speed operation and gas compression, which requires the pump oil to have a high boiling point and good thermal stability. The high phenyl content of phenyl silicone oil gives it a higher boiling point, which can generally reach more than 300°C, and can withstand the high temperature generated when the diffusion pump is working without boiling or decomposition. At the same time, in a high temperature environment, the molecular structure of phenyl silicone oil can remain stable and will not deteriorate due to reactions such as thermal oxidation. This thermal stability enables phenyl silicone oil to maintain its key properties such as lubrication and sealing under long-term high-temperature working conditions, ensuring the stable operation of the high vacuum diffusion pump. Taking large vacuum coating equipment as an example, during the long coating process, the high vacuum diffusion pump is continuously in a high-temperature working state. Phenyl silicone oil, with its high boiling point and thermal stability, ensures that the high vacuum environment required for the coating process is always stable, thereby producing high-quality coating products.


3. Anti-oxidation and anti-radiation performance
In some special application scenarios, such as vacuum equipment related to space science research and nuclear industry, high vacuum diffusion pumps will face radiation environments. At the same time, oxidation reactions may also occur when the pump oil comes into contact with air. Phenyl silicone oil has excellent anti-oxidation and anti-radiation properties, and the phenyl group in its molecular structure has a good protective effect on the silicon-oxygen main chain. When irradiated, the phenyl group can absorb part of the energy and reduce the damage to the silicon-oxygen bond, thereby maintaining the integrity of the molecular structure. In terms of anti-oxidation, phenyl silicone oil can resist the oxidation of oxygen in the air and slow down the rate of performance degradation. This allows phenyl silicone oil to maintain good performance in harsh working environments, extend the service life of high vacuum diffusion pumps, and reduce the frequency of equipment maintenance and pump oil replacement.


4. Good lubrication and sealing performance
There are high-speed rotating parts and complex sealing structures inside the high vacuum diffusion pump, and the pump oil needs to have good lubrication and sealing performance. The low surface tension of phenyl silicone oil enables it to form a uniform lubricating film on the metal surface, effectively reducing friction and wear between parts, reducing energy loss, and improving the operating efficiency of the diffusion pump. At the same time, it can fill the tiny gaps inside the diffusion pump, form a good seal, prevent gas leakage, and ensure the stability of the high vacuum environment. In the precision electron microscope vacuum system, the high vacuum diffusion pump relies on the lubrication and sealing performance of phenyl silicone oil to ensure the stable transmission of the electron beam in a high vacuum environment, thereby obtaining high-resolution images.


Application of phenyl silicone oil in high vacuum diffusion pumps in different fields
1. Semiconductor manufacturing field
Semiconductor manufacturing is one of the industries with the most demanding requirements for vacuum environment. In all aspects of chip manufacturing, such as etching, ion implantation, chemical vapor deposition and other processes, they need to be carried out in a high vacuum environment to avoid the influence of impurities on chip performance. As a key equipment for obtaining high vacuum, high vacuum diffusion pumps are widely used in semiconductor manufacturing production lines. Phenyl silicone oil, as a pump oil, provides stable and reliable operation guarantee for these high vacuum diffusion pumps. It can not only maintain ultra-high vacuum and meet the strict requirements of chip manufacturing for environmental purity, but also maintain stable performance during long-term continuous work, ensure the continuity and consistency of semiconductor manufacturing processes, and help produce high-performance, low-defect semiconductor chips.


2. Vacuum coating industry
Vacuum coating technology is widely used in many fields such as optics, electronics, and decoration. During the coating process, a high vacuum environment needs to be created through a high vacuum diffusion pump so that the coating material can be evenly deposited on the substrate surface. Phenyl silicone oil, as a high vacuum diffusion pump oil, can ensure high vacuum in the coating equipment, thereby obtaining a high-quality coating layer. For example, in optical coating, a precise vacuum environment is crucial to controlling the thickness and optical properties of the film layer. The low vapor pressure and good thermal stability of phenyl silicone oil ensure the stability of the vacuum during the coating process, which helps to prepare films with excellent optical properties such as high transmittance and low reflectivity.


3. Scientific research instruments and equipment
In many scientific research instruments, such as mass spectrometers and electron spectrometers, a high vacuum environment is required to ensure accurate measurement and analysis of the instrument. High vacuum diffusion pumps provide the required vacuum conditions for these instruments, and phenyl silicone oil is the key to ensuring the efficient operation of diffusion pumps. Taking mass spectrometers as an example, in components such as ion sources and mass analyzers, high vacuum environments can reduce the collision between ions and gas molecules, improve ion transmission efficiency and mass spectrometry resolution. The antioxidant, anti-radiation and good lubrication and sealing properties of phenyl silicone oil enable the high vacuum diffusion pump in the mass spectrometer to operate stably under complex working conditions, providing researchers with accurate and reliable experimental data.
Development trend of phenyl silicone oil as high vacuum diffusion pump oil
With the continuous advancement of science and technology, the requirements for high vacuum environments are getting higher and higher, which also poses higher challenges to high vacuum diffusion pump oil. In the future, phenyl silicone oil as a high vacuum diffusion pump oil will develop in the direction of higher performance and more environmental protection. On the one hand, by improving the synthesis process and molecular structure design, the thermal stability of phenyl silicone oil can be further improved and the vapor pressure can be reduced to meet the stringent requirements of the next generation of semiconductor manufacturing technologies such as extreme ultraviolet lithography (EUV) for ultra-high vacuum environments. On the other hand, considering environmental factors, developing a greener and more environmentally friendly preparation method for phenyl silicone oil, reducing pollutant emissions in the production process, and improving the recyclability and biodegradability of the product will be an important development direction in the future.


Conclusion
Phenyl silicone oil has become an excellent choice for high vacuum diffusion pump oil due to its low vapor pressure, high boiling point, good thermal stability, antioxidant and radiation resistance, and excellent lubrication and sealing properties. In many fields such as semiconductor manufacturing, vacuum coating, and scientific research instruments, phenyl silicone oil helps high vacuum diffusion pumps provide a stable and reliable high vacuum environment for various processes and research. With the continuous development of science and technology, phenyl silicone oil is expected to play a more important role in the high vacuum field through continuous innovation and optimization, and promote related industries to a higher stage of development.